Plasma source: Difference between revisions

Revision as of 11:28, 24 February 2004

Revision as of 11:28, 24 February 2004

Line 7:

**[[Microwave (MW) discharge (GHz)]]

**[[Optical frequencies (THz)]]

*[[Excitation modes]]

**[[Inductively coupled plasma]]

Line 13 ⟶ 12:

***[[Planar coil]]

***[[Helical resonator]]

**[[Capacitively coupled plasma]]

***[[Parallel plate recator]]

**[[Wave-heated plasma]]

***[[Electron cyclotron resonance]]

Line 22 ⟶ 19:

***[[Surface-wave-sustained mode]]

***[[Resonator mode]]

*[[Pressure ranges]]

**[[Low pressure discharge]]