Multiple patterning: Revision history

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curprev 13:0613:06, 17 August 2025 2001:b011:e008:1fb7:6ca1:5c98:acb0:fb52 talk 72,292 bytes +366 →DRAM undo

curprev 08:4508:45, 6 August 2025 Finlay McWalter talk contribs 71,926 bytes +5 →top: link undo

curprev 12:0012:00, 3 August 2025 2001:b011:e008:78e0:edd6:d8af:5f1f:6360 talk 71,921 bytes +281 →Directed self-assembly (DSA) undo

curprev 06:0906:09, 6 June 2025 2406:7400:51:1665:a8d7:72d6:533e:d877 talk 71,640 bytes −31 →References: This is an american invention by Micron chip undo

curprev 02:2002:20, 5 June 2025 Guiding light talk contribs 71,671 bytes +175 →EUV Multipatterning undo
curprev 01:4601:46, 5 June 2025 Guiding light talk contribs 71,496 bytes +54 →EUV Multipatterning undo
curprev 01:2901:29, 5 June 2025 Guiding light talk contribs 71,442 bytes +263 →EUV Multipatterning undo

curprev 06:0106:01, 1 June 2025 Guiding light talk contribs 71,179 bytes +217 →Pitch splitting undo
curprev 05:5405:54, 1 June 2025 2001:b011:e008:9102:246c:ab9a:c4a8:6342 talk 70,962 bytes 0 →Pitch splitting undo
curprev 05:5305:53, 1 June 2025 2001:b011:e008:9102:246c:ab9a:c4a8:6342 talk 70,962 bytes +297 →Pitch splitting undo

curprev 03:2903:29, 18 May 2025 208.87.233.201 talk 70,665 bytes +146 →Multipatterning productivity improvements undo

curprev 10:5010:50, 11 May 2025 2001:b011:e008:9cb3:396b:e0e3:489c:7521 talk 70,519 bytes +237 →Multipatterning productivity improvements undo

curprev 13:1613:16, 5 May 2025 2001:b011:e008:7b0f:240b:6bd7:cc81:e774 talk 70,282 bytes +21 →3nm node undo
curprev 13:1513:15, 5 May 2025 2001:b011:e008:7b0f:240b:6bd7:cc81:e774 talk 70,261 bytes +332 →7nm and 5nm FinFETs undo

curprev 01:0301:03, 3 April 2025 2001:b011:e008:318b:f11d:ada6:eeb5:7356 talk 69,929 bytes −6 →Pitch splitting undo

curprev 06:4406:44, 2 April 2025 2001:b011:e008:318b:c13:6a3d:db6d:400a talk 69,935 bytes +237 →Pitch splitting undo

curprev 03:5503:55, 19 March 2025 WikiCleanerBot talk contribs m 69,698 bytes −1 v2.05b - Bot T3 CW#46 - Fix errors for CW project (Square brackets without correct beginning) undo Tag: WPCleaner

curprev 22:1622:16, 16 March 2025 2001:b011:e008:955d:60d3:d770:8579:df4f talk 69,699 bytes +28 →Industrial adoption undo
curprev 14:5114:51, 16 March 2025 1.175.136.218 talk 69,671 bytes +109 →3nm node undo

curprev 16:1316:13, 13 March 2025 2001:b011:e008:7b1c:c91:ad25:7bcc:d3aa talk 69,562 bytes +63 →Multi-Spacer Pitch Reduction undo
curprev 16:1116:11, 13 March 2025 2001:b011:e008:7b1c:c91:ad25:7bcc:d3aa talk 69,499 bytes +311 →Self-aligned quadruple patterning ({{vanchor|SAQP}}) undo

curprev 16:0816:08, 4 March 2025 2001:b011:e008:771c:7058:9b1b:3487:8be8 talk 69,188 bytes +179 →Mixed patterning methods undo

curprev 13:4613:46, 4 February 2025 2001:b011:e008:b221:9027:acae:7e6d:4659 talk 69,009 bytes +34 →Directed self-assembly (DSA) undo
curprev 13:4413:44, 4 February 2025 2001:b011:e008:b221:9027:acae:7e6d:4659 talk 68,975 bytes +5 →Directed self-assembly (DSA) undo
curprev 13:4413:44, 4 February 2025 2001:b011:e008:b221:9027:acae:7e6d:4659 talk 68,970 bytes +466 →Directed self-assembly (DSA) undo

curprev 17:1617:16, 5 January 2025 KMaster888 talk contribs 68,504 bytes −11 →Two-dimensional pattern rounding: ce undo

curprev 05:1605:16, 4 December 2024 Guiding light talk contribs 68,515 bytes +8 →Mixed patterning methods undo
curprev 01:4101:41, 4 December 2024 Guiding light talk contribs 68,507 bytes +259 →Mixed patterning methods undo

curprev 07:2607:26, 25 November 2024 Citation bot talk contribs 68,248 bytes +1,715 Altered template type. Add: pages, volume, isbn, page, date, title, chapter, doi, authors 1-10. editors 1-2. Changed bare reference to CS1/2. Removed parameters. | Use this bot. Report bugs. | Suggested by Headbomb | #UCB_toolbar undo
curprev 07:2207:22, 25 November 2024 Headbomb talk contribs 66,533 bytes −373 +a few undo
curprev 07:1807:18, 25 November 2024 Headbomb talk contribs 66,906 bytes −21 10.1117/12.2219321 undo
curprev 05:2305:23, 25 November 2024 Citation bot talk contribs 66,927 bytes −9 Altered url. URLs might have been anonymized. Add: pmid, journal, bibcode, doi, issue, volume. Removed parameters. Some additions/deletions were parameter name changes. | Use this bot. Report bugs. | Suggested by Headbomb | Linked from Wikipedia:WikiProject_Academic_Journals/Journals_cited_by_Wikipedia/Sandbox | #UCB_webform_linked 130/308 undo

curprev 22:4722:47, 3 November 2024 2001:b011:e008:1f91:8476:1278:632a:497b talk 66,936 bytes +134 →Mixed patterning methods undo
curprev 07:1307:13, 3 November 2024 2001:b011:e008:1f91:a059:18dc:1e83:3635 talk 66,802 bytes +29 →Mixed patterning methods undo
curprev 05:0905:09, 3 November 2024 Guiding light talk contribs 66,773 bytes −203 →Mixed patterning methods undo

curprev 14:4214:42, 26 October 2024 2001:b011:e003:5225:c1ea:391:91fe:b4e talk 66,976 bytes +192 →Mixed patterning methods undo

curprev 04:2804:28, 31 July 2024 GreenC bot talk contribs 66,784 bytes +166 Rescued 1 archive link. Wayback Medic 2.5 per WP:URLREQ#ieee.org undo

curprev 15:0615:06, 18 May 2024 2001:b011:e003:57c6:b059:2ac9:8e71:3d71 talk 66,618 bytes +264 →DRAM undo

curprev 05:2505:25, 13 May 2024 OAbot talk contribs m 66,354 bytes +19 Open access bot: doi updated in citation with #oabot. undo

curprev 09:0709:07, 11 May 2024 Folly Mox talk contribs 66,335 bytes +157 fixed cite journal requires journal x2 undo Tags: Mobile edit Mobile web edit Advanced mobile edit
curprev 08:5708:57, 11 May 2024 Folly Mox talk contribs 66,178 bytes +500 →Two-dimensional pattern rounding: fixed a few citations undo Tags: Mobile edit Mobile web edit Advanced mobile edit
curprev 08:4108:41, 11 May 2024 Folly Mox talk contribs 65,678 bytes −149 →EUV multiple patterning possibilities: LinkedIn is not a reliable source undo Tags: Mobile edit Mobile web edit Advanced mobile edit

curprev 00:5200:52, 17 April 2024 Guiding light talk contribs 65,827 bytes −239 →Multipatterning productivity improvements undo

curprev 00:4200:42, 16 February 2024 Citation bot talk contribs 64,994 bytes −1 Alter: title, template type. Added chapter. Removed parameters. | Use this bot. Report bugs. | Suggested by Лисан аль-Гаиб | #UCB_webform 43/100 undo

curprev 08:5408:54, 10 December 2023 Guiding light talk contribs 64,995 bytes 0 →Pitch splitting undo

Multiple patterning: Revision history

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