Process development execution system: Difference between revisions

Revision as of 17:52, 11 May 2020

Latest revision as of 03:03, 6 March 2023

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{{Use dmy dates|date=JuneMarch 20132023}}

'''Process development execution systems''' ('''PDES''') are [[software system]]s used to guide the development of high-tech manufacturing technologies like [[semiconductor]] manufacturing, [[MEMS]] manufacturing, [[photovoltaics]] manufacturing, [[biomedical]] devices or [[nanoparticle]] manufacturing. Software systems of this kind have similarities to [[product lifecycle management]] (PLM) systems. They guide the development of new or improved technologies from its conception, through development and into manufacturing. Furthermore, they borrow on concepts of [[manufacturing execution systems]] (MES) systems but tailor them for R&D rather than for production. PDES integrate people (with different backgrounds from potentially different legal entities), data (from diverse sources), information, knowledge and business processes.

== Benefits ==

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# check process flows using these rules. This rule check verifies the principle manufacturability of a newly designed manufacturing flow.

The processing rule check gives no indication about the functionality or even the structure of the produced good or device. In the area of [[semiconductor device fabrication]], the techniques of [[semiconductor process simulation]] / [[Technology CAD|TCAD]] can provide an idea about the produced structures. To support this ’virtual'virtual fabrication’fabrication', a PDES is able to manage simulation models for process steps. Usually the simulation results are seen as standalone data. To rectify this situation PDESs are able to manage the resulting files in combination with the process flow. This enables the engineer to easily compare the expected results with the simulated outcome. The knowledge gained from the comparison can again be used to improve the simulation model.

After virtual verification the device is produced in an experimental fabrication environment. A PDES allows a transfer of the process flow to the fabrication environment (for example in semiconductor: [[Fab (semiconductors)|FAB]]). This can be done by simply printing out a runcard for the operator or by interfacing to the [[Manufacturing Execution Systems]] (MES) of the facility. On the other hand, a PDES is able to manage and document last minute changes to the flow like parameter adjustments during the fabrication.

During and after processing a lot of measurements are taken. The results of these measurements are often produced in the form of files such as images or simple text files containing rows and columns of data. The PDES is able to manage these files, to link related results together, and to manage different versions of certain files, for example reports. Paired with flexible text, and graphical retrieval and search methods, a PDES provides the mechanism to view and assess the accumulated data, information and knowledge from different perspectives. It provides insight into both the information aspects as well as the time aspects of previous developments.

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== References ==

*D. Ortloff, J. Popp, T. Schmidt, and R. Brück. Process Development Support Environment: A tool SUITE TO ENGINEER MANUFACTURING SEQUENCES Inin International Journal of Nanomanufacturing, “Recent"Recent Developments and Innovations in NEMS/MEMS devices”devices", 2007

*T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, and R. Brück. OPTIMIZATION OF MEMS FABRICATION PROCESS DESIGN BY VIRTUAL EXPERIMENTS. In Proceedings of SPIE: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, Adelaide, volume 6415, 2006. Smart Materials, Nano and Micro-Smart Systems 2006.

*NEXUS news. [http://www.mstnews.de/downloads/pdf/news-0208.pdf "Successful Outcome from the PROMENADE Project..."], ''mst|news'', April 2008.