Plasma processing: Difference between revisions

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'''Plasma processing''' is a [[Plasma (physics)|plasma]]-based material processing technology that aims at modifying the chemical and physical properties of a surface.<ref>{{cite book |last1=National Research Council |title=Plasma Processing of Materials: Scientific Opportunities and Technological Challenges |date=1991 |publisher=National Academies Press |___location=Washington, DC |isbn=978-0-309-04597-1 |url=https://doi.org/10.17226/1875}}</ref>
 
'''Plasma processing''' is a [[Plasma (physics)|plasma]]-based material processing technology that aims at modifying the chemical and physical properties of a surface.<ref>{{cite book |last1=National Research Council |title=Plasma Processing of Materials: Scientific Opportunities and Technological Challenges |date=1991 |publisher=National Academies Press |___location=Washington, DC |doi=10.17226/1875 |isbn=978-0-309-04597-1 |url=https://doi.org/10.17226/1875}}</ref>
 
Plasma processing techniques include:
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Related topics are [[plasma chemistry]], [[chemical vapor deposition]], and [[physical vapor deposition]] processes like [[sputter deposition]], plasma iondoping, [[vacuum plasmaspraying]], and [[reactive ion etching]].
 
==See also==
*[[List of plasma (physics) applications articles]]
 
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[[Category:Plasma processing| ]]
 
==References==
{{reflist}}
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[[Category:Plasma processing| ]]