'''Silicon Microstructures, Inc.''' (SMI) is a producer of and supplier of [[pressure sensor]]s and [[microstructure]]s located in Milpitas, CA.
Silicon Microstructures, Inc. was founded in 1991 as a commercial source of high-performance silicon [[pressure sensor]]s, including [[MEMS]] sensors, and [[accelerometers]]. Its first product was a [[silicon sensor]] for very low-pressure usage.
In April 2001, a SMI became a subsidiary of Elmos Semiconductor AG. After the Merger, SMI began production on higher performance, system level sensors and microstructures, wireless, RF and bus addressable microstructures.
In August 2002, SMI acquired the IC Sensors' wafer fab operations and wafer R&D group and relocated to Milpitas, California. The following year, SIlicon Microstructures undertook a significant and complete wafer fab upgrade to expand the facility for full 6" wafer handling.
This facility is currently processing primarily 6 inch wafers and has advanced etch capabilities including Deep Reactive Ion Etching ([[DRIE]]) and Plasma Enhanced [[Fusion Bonding]].
