Plasma source: Difference between revisions

Revision as of 11:28, 24 February 2004

Latest revision as of 03:46, 12 August 2014

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#REDIRECT [[Plasma (physics)]]

[[Plasma excitation by electromagnetic fields]]

*[[Frequency ranges]]

**[[Direct current (DC) discharge]]

**[[kHz]]

**[[Radio-frequency (RF) discharge (MHz)]]

**[[Microwave (MW) discharge (GHz)]]

**[[Optical frequencies (THz)]]

*[[Excitation modes]]

**[[Inductively coupled plasma]]

***[[Solenoid coil]]

***[[Planar coil]]

***[[Helical resonator]]

**[[Capacitively coupled plasma]]

***[[Parallel plate recator]]

**[[Wave-heated plasma]]

***[[Electron cyclotron resonance]]

***[[Helicon discharge]]

***[[Surface-wave-sustained mode]]

***[[Resonator mode]]

*[[Pressure ranges]]

**[[Low pressure discharge]]

**[[Atmospheric pressure discharge]]