Capacitive displacement sensor: Difference between revisions

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{{Short description|Non-contact high precision sensors}}

'''Capacitive displacement sensors''' “are non-contact devices capable of high-resolution measurement of the position and/or change of position of any conductive target”.<ref name="LionCapOverview">[http://www.lionprecision.com/capacitive-sensors/index.html#apps Lion Precision Capacitive Sensor Overview], An overview of [[capacitive sensing]] [[technology]] from Lion Precision.</ref> They are also able to measure the thickness or density of [[Non-conductor|non-conductive]] materials.<ref name="SensorTechHandbook">{{cite book|isbn=0-7506-7729-5|title=Sensor Technology Handbook|page=94|url=http://books.google.com/books?id=fdeToUK8edMC&pg=PT94|author=Jon S. Wilson|publisher=Newnes|year=2005}}</ref> Capacitive displacement sensors are used in a wide variety of applications including [[semiconductor]] processing, assembly of precision equipment such as [[disk drive]]s, precision thickness measurements, [[machine tool]] [[metrology]] and [[assembly line]] testing. These types of sensors can be found in [[machining]] and [[manufacturing]] facilities around the world.

[[File:Pepperl+Fuchs capacitive sensor CJ8-18GM-E2-V1.jpg|thumb|Industrial capacitive sensor]]

'''Capacitive displacement sensors''' “areare non-contacta devices capablekind of highnon-resolutioncontact [[Displacement measurement|displacement ofsensor]], measuring the position and/or change of position ofin anycapacitive conductivematerials target”to a high resolution.<ref name="LionCapOverview">[http://www.lionprecision.com/capacitive-sensors/index.html#apps Lion Precision Capacitive Sensor Overview], An overview of [[capacitive sensing]] [[technology]] from Lion Precision.</ref> They are also able to measure the thickness or density of [[Non-conductor|non-conductive]] materials.<ref name="SensorTechHandbook">{{cite book|isbn=0-7506-7729-5|title=Sensor Technology Handbook|page=94|url=httphttps://books.google.com/books?id=fdeToUK8edMC&pg=PT94|author=Jon S. Wilson|publisher=Newnes|year=2005}}</ref> Capacitive displacement sensors are used in a wide variety of applications including [[semiconductor]] processing, assembly of precision equipment such as [[disk drive]]s, precision thickness measurements, [[machine tool]] [[metrology]] and [[assembly line]] testing. These types of sensors can be found in [[machining]] and [[manufacturing]] facilities around the world.

==Basic capacitive theory==

Two identical parallel conductive plates of area <math>A</math> separated by a gap of distance <math>d</math> will have a [[capacitance]] <math>C</math> of:

[[Capacitance]] is an electrical property which is created by applying an [[electrical charge]] to two conductive objects with a gap between them. A simple demonstration is two parallel conductive plates of the same profile with a gap between them and a charge applied to them. In this situation, the Capacitance can be expressed by the [[equation]]:

:<math> C = \dfrac{\varepsilon_0 K\varepsilon_r A}{d} </math> <ref name="Physics">{{cite book|isbn=0-87901-135-1|title=Physics Second Edition|author=Paul Allen Tipler|pages=653–660|publisher=Worth Publishers|year=1982}}</ref>

Wherewhere ''C'' is the capacitance, ε<submath>0\varepsilon_0</submath> is the [[permittivity of free space]] constant, and ''K<math>\varepsilon_r</math>'' is the [[dielectricrelative constantpermittivity]] of(also the material incalled the gap,dielectric ''A'' is the areaconstant) of the plates,material and ''d'' isin the distance between the platesgap.

There are two general types of capacitive displacement sensing systems. One type is used to measure thicknesses of conductive materials. The other type measures thicknesses of non conductive materials or the level of a fluid.

A capacitive sensing system for conductive materials uses a model similar to the one described above, but in place of one of the conductive plates, is the [[sensor]], and in place of the other, is the conductive target to be measured. Since the area of the probe and target remain constant, and the [[dielectric]] of the material in the gap (usually air) also remains constant, "any change in capacitance is a result of a change in the distance between the probe and the target." <ref name="LionCapTheory">[http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html Capacitive Sensor Operation and Optimization How Capacitive Sensors Work and How to Use Them Effectively] {{Webarchive|url=https://web.archive.org/web/20151202093819/http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html |date=2015-12-02 }}, An in depth discussion of capacitive sensor theory from Lion Precision.</ref> Therefore, the equation above can be simplified to:

:<math>C \propto \dfrac{1}{d} </math>

where α indicates a proportional relationship. Due to this proportional relationship, a capacitive sensing system is able to measure changes in capacitance and translate these changes intoin distance measurements.

Where α indicates a proportional relationship.

Due to this proportional relationship, a capacitive sensing system is able to measure changes in capacitance and translate these changes into distance measurements.

The operation of the sensor for measuring thickness of non-conductive materials can be thought of as two capacitors in series, with each having a different dielectric (and dielectric constant). The sum of the thicknesses of the two dielectric materials remains constant but the thickness of each can vary. The thickness of the material to be measured displaces the other dielectric. The gap is often an air gap, (dielectric constant = 1''<math>\varepsilon_r</math>''≈1) and the material has a higher dielectric. As the material gets thicker, the capacitance increases and is sensed by the system.

A sensor for measuring fluid levels works as two capacitors in parallel with constant total area. Again the difference in the dielectric constant of the fluid and the dielectric constant of air results in detectable changes in the capacitance between the conductive probes or plates.

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==Applications==

<ref></ref>===Precision positioning===

One of the more common applications of capacitive sensors is for precision positioning. Capacitive displacement sensors can be used to measure the position of objects down to the [[nanometer]] level. This type of precise positioning is used in the semiconductor industry where [[silicon wafer]]s need to be positioned for exposure. Capacitive sensors are also used to pre-focus the [[electron microscope]]s used in testing and examining the wafers.

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===Precision thickness measurements===

Capacitive displacement sensors can be used to make very precise [[thickness]] measurements. Capacitive displacement sensors operate by measuring changes in position. If the position of a reference part of known thickness is measured, other parts can be subsequently measured and the differences in position can be used to determine the thickness of these parts.<ref name="LionCapThickness">[http://www.lionprecision.com/tech-library/appnotes/app-flash/f-cap-0030-thickness.html Capacitive Thickness Measurements], A tutorial on capacitive thickness measurements.</ref> In order for this to be effective using a single probe, the parts must be completely flat and measured on a perfectly flat surface. If the part to be measured has any [[curvature]] or [[deformity]], or simply does not rest firmly against the flat surface, the distance between the part to be measured and the surface it is placed upon will be erroneously included in the thickness measurement. This error can be eliminated by using two capacitive sensors to measure a single part. Capacitive sensors are placed on either side of the part to be measured. By measuring the parts from both sides, curvature and deformities are taken into account in the [[measurement]] and their effects are not included in the thickness readings.

The thickness of plastic materials can be measured with the material placed between two electrodes a set distance apart. These form a type of capacitor. The plastic when placed between the electrodes acts as a dielectric and displaces air (which has [[dielectric constant]] of 1, different thanfrom the plastic). Consequently, the capacitance between the electrodes changes. The capacitance changes can then be measured and correlated with the material's thickness.<ref>[http://www.lionprecision.com/tech-library/appnotes/dual-0010-film-thick.html Film thickness gauge]</ref>

Capacitive sensors circuits can be constructed that are able to detect changes in capacitance on the order of a 10⁻⁵ [[Farad|picofarads]] (10 attofarads).

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===Machine tool metrology===

Capacitive displacement sensors are often used in metrology applications. In many cases, sensors are used “to measure shape errors in the part being produced. But they also can measure the errors arising in the equipment used to manufacture the part, a practice known as machine tool metrology”.<ref name="LLNL">[https://www.llnl.gov/str/Blaedel.html Lawrence Livermore National Laboratory: Engineering Precision into Laboratory Projects], Examples of advances made by LLNL in the field of precision measurement.</ref> In many cases, the sensors are used to analyze and optimize the rotation of spindles in various machine tools, examples include [[surface grinder]]s, [[lathe]]s, [[milling machine]]s, and [[air bearing]] spindles.<ref name="PrecisionSpindleMetrology">{{cite book|isbn=978-1-60595-003-37|title=Precision Spindle Metrology|author=Eric R. Marsh|publisher=Destech Pubns Inc|year=2009}}</ref> By measuring errors in the machines themselves, rather than simply measuring errors in the final products, problems can be dealt with and fixed earlier in the manufacturing process.

===Assembly line testing===

Capacitive displacement sensors are often used in assembly line testing. Sometimes they are used to test assembled parts for [[uniformity]], thickness or other design features. At other times, they are used to simply look for the presence or absence of a certain component, such as [[glue]].<ref name="LionGlue">[http://www.lionprecision.com/tech-library/appnotes/app-flash/f-cap-0040-glue.html Sensing Glue on Paper] {{Webarchive|url=https://web.archive.org/web/20100709200903/http://www.lionprecision.com/tech-library/appnotes/app-flash/f-cap-0040-glue.html |date=2010-07-09 }}, A tutorial on using capacitive sensors for glue sensing.</ref> Using capacitive sensors to test assembly line parts can help to prevent quality concerns further along in the production process.

==Comparison to eddy current displacement sensors==

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*[http://www.tectrends.com/cgi/showan?an=00174300 Medical Engineering ] - Patient Monitoring Using Capacitive Sensors

*[http://www.capacitance-sensors.com/capacitive_sensor_tutorial.htm Capacitive Sensors for Motion Control] - Tutorial on Capacitive Sensors for Nanopositioning Applications

*[http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html Capacitive Sensor Theory] {{Webarchive|url=https://web.archive.org/web/20151202093819/http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html |date=2015-12-02 }} - How Capacitive Sensors Work and How to Use Them Effectively

{{DEFAULTSORT:Capacitive Displacement Sensor}}

[[Category:SensorsPosition sensors]]

[[Category:Measuring instruments]]

[[fr:Capteur de déplacement capacitif]]

[[ru:Ёмкостный датчик]]