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There are other enhancements within OASIS<sup>®</sup> not stated here directly. OASIS is now a formal industry standard that is owned and maintained by the trade and standards organization SEMI that serves the semiconductor materials and equipment industries worldwide. For a very small fee, the standard can be downloaded from the SEMI web-site. The link to SEMI's Standards page is below.
The SEMI P39 OASIS<sup>®</sup> standard was developed starting in the fall of 2001 by a consortium of volunteer Semiconductor, Electronic Design Automation and Mask Manufacturing companies and then donated to SEMI. The trade name OASIS<sup>®</sup> is a registered trademark owned by Thomas J. Grebinski, Alamo, California and licensed for use exclusively by
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