Revision as of 15:04, 13 November 2008 edit 137.71.23.54 (talk) Applications: listed oxygen as etchant gas species, corrected to SF6. ← Previous edit		Revision as of 09:28, 3 December 2008 edit undo TechBot (talk \| contribs) 12,222 edits m robot Modifying: de:Reaktives Ionentiefenätzen Next edit →
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Deep reactive-ion etching: Difference between revisions