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[[File:TiO2 Terraced and Streaked RHEED Pattern.gif|thumbnail|400px|'''Figure 7'''. Streaked RHEED pattern from the TiO<sub>2</sub> (110) surface. The sample had a terraced surface, which caused noticeable streaking compared to the RHEED pattern from the flat TiO<sub>2</sub> (110) surface shown above.]]
Surface features and polycrystalline surfaces add complexity or change RHEED patterns from those from perfectly flat surfaces. Growing films, nucleating particles, crystal twinning, grains of varying size and adsorbed species add complicated diffraction conditions to those of a perfect surface.<ref name="bozovic2001">{{cite book|author=Bozovic I|author2=Eckstein J N|author3=Bozovic N|last-author-amp=yes|title=In Situ Real-Time Characterization of Thin Films|publisher=John Wiley and Sons: New York|date=2001|pages=29–56|editor=Auceillo O|editor2=Krauss A R|url=https://books.google.com/books?id=kmyVA1OYB_UC&pg=PA29|isbn=0-471-24141-5}}</ref><ref name="brewer2001">{{cite journal|author=Brewer R T|author2=Hartman J W|author3=Groves J R|author4=Arendt P N|author5=Yashar P C|author6=Atwater H A|last-author-amp=yes|title=Rheed in-plane rocking curve analysis of biaxially-textured polycrystalline MgO films on amorphous substrates grown by ion beam-assisted deposition|journal=Appl. Surf. Sci.|volume=175|issue=1–2|pages=
==Specialized RHEED techniques==
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===RHEED-TRAXS===
Reflection high energy electron diffraction - total reflection angle X-ray spectroscopy is a technique for monitoring the chemical composition of crystals.<ref>{{cite journal|last1=Hasegawa|first1=Shuji|last2=Ino|first2=Shozo|last3=Yamamoto|first3=Youiti|last4=Daimon|first4=Hiroshi|title=Chemical Analysis of Surfaces by Total-Reflection-Angle X-Ray Spectroscopy in RHEED Experiments (RHEED-TRAXS)|journal=Japanese Journal of Applied Physics|volume=24|issue=6|pages=
RHEED-TRAXS is preferential to X-ray microanalysis (XMA)(such as [[Energy-dispersive X-ray spectroscopy|EDS]] and [[Wavelength dispersive X-ray spectroscopy|WDS]]) because the incidence angle of the electrons on the surface is very small, typically less than 5°. As a result, the electrons do not penetrate deeply into the crystal, meaning the X-ray emission is restricted to the top of the crystal, allowing for real-time, in-situ monitoring of surface stoichiometry.
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