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The diffracted electrons interfere constructively at specific angles according to the crystal structure and spacing of the atoms at the sample surface and the wavelength of the incident electrons. Some of the electron waves created by constructive interference collide with the detector, creating specific diffraction patterns according to the surface features of the sample. Users characterize the crystallography of the sample surface through analysis of the diffraction patterns. Figure 2 shows a RHEED pattern. Video 1 depicts a metrology instrument recording the RHEED intensity oscillations and deposition rate for process control and analysis.
[[File:TiO2 Good Surface.gif|thumbnail|400px|'''Figure 2'''. A RHEED pattern obtained from electron diffraction from a clean TiO2 (110) surface. The bright spots indicate where many electrons reach the detector. The lines that can be observed are [[Kikuchi lines (physics)|Kikuchi Lines]].]]
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