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===RHEED-TRAXS===
Reflection high energy electron diffraction - total reflection angle X-ray spectroscopy is a technique for monitoring the chemical composition of crystals.<ref>{{cite journal|last1=Hasegawa|first1=Shuji|last2=Ino|first2=Shozo|last3=Yamamoto|first3=Youiti|last4=Daimon|first4=Hiroshi|title=Chemical Analysis of Surfaces by Total-Reflection-Angle X-Ray Spectroscopy in RHEED Experiments (RHEED-TRAXS)|journal=Japanese Journal of Applied Physics|volume=24|issue=6|pages=L387–L390|date=1985|doi=10.1143/JJAP.24.L387|bibcode = 1985JaJAP..24L.387H |s2cid=94132569 }}</ref> RHEED-TRAXS analyzes X-ray spectral lines emitted from a crystal as a result of electrons from a RHEED gun colliding with the surface.
RHEED-TRAXS is preferential to X-ray microanalysis (XMA)(such as [[Energy-dispersive X-ray spectroscopy|EDS]] and [[Wavelength dispersive X-ray spectroscopy|WDS]]) because the incidence angle of the electrons on the surface is very small, typically less than 5°. As a result, the electrons do not penetrate deeply into the crystal, meaning the X-ray emission is restricted to the top of the crystal, allowing for real-time, in-situ monitoring of surface stoichiometry.
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