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=== Integrated EBSD/EDS mapping ===
When simultaneous EDS/EBSD collection can be achieved, the capabilities of both techniques can be enhanced.<ref>{{Cite news |date=2015 |title=Discriminating Phases with Similar Crystal Structures Using Electron Backscatter Diffraction (EBSD) and Energy Dispersive X-Ray Spectrometry (EDS) |url=https://www.azonano.com/article.aspx?ArticleID=3955 |url-status=live |archive-url=https://web.archive.org/web/20230302142457/https://www.azonano.com/article.aspx?ArticleID=3955 |archive-date=2023-03-02 |website=AZoNano.com }}</ref> There are applications where sample chemistry or phase cannot be differentiated via EDS alone because of similar composition, and structure cannot be solved with EBSD alone because of ambiguous structure solutions.<ref>{{Cite journal |last1=Nolze |first1=G. |last2=Geist |first2=V. |last3=Neumann |first3=R. Saliwan |last4=Buchheim |first4=M. |date=2005|title=Investigation of orientation relationships by EBSD and EDS on the example of the Watson iron meteorite |journal=Crystal Research and Technology |volume=40 |issue=8 |pages=791–804 |doi=10.1002/crat.200410434|s2cid=96785527|doi-access=free }}</ref><ref>{{Cite web |date=2022-11-29 |title=Uncovering the tiny defects that make materials fail |url=https://physicsworld.com/uncovering-the-tiny-defects-that-make-materials-fail/ |url-status=live |archive-url=https://web.archive.org/web/20230303225536/https://physicsworld.com/a/uncovering-the-tiny-defects-that-make-materials-fail/ |archive-date=2023-03-03 |website=Physics World}}</ref> To accomplish integrated mapping, the analysis area is scanned, and at each point, Hough peaks and EDS region-of-interest counts are stored. Positions of phases are determined in [[X-ray crystallography|X-ray]] maps, and each element's measured EDS intensities are given in charts. The chemical intensity ranges are set for each phase to select the grains.<ref>{{Cite journal |last1=Kell |first1=J. |last2=Tyrer |first2=J. R. |last3=Higginson |first3=R. L. |last4=Thomson |first4=R. C. |date=2005 |title=Microstructural characterization of autogenous laser welds on 316L stainless steel using EBSD and EDS |journal=Journal of Microscopy |volume=217 |issue=2 |pages=167–173 |doi=10.1111/j.1365-2818.2005.01447.x|pmid=15683414 |s2cid=12285114}}</ref> All patterns are then re-indexed off-line. The recorded chemistry determines which phase/crystal-structure file is used to index each point. Each pattern is indexed by only one phase, and maps displaying distinguished phases are generated. The interaction volumes for EDS and EBSD are significantly different (on the order of [[micrometre]]s compared to tens of [[nanometres]]), and the shape of these volumes using a highly tilted sample may have implications on algorithms for phase discrimination.<ref name=":21" /><ref>{{Cite journal |last1=West |first1=G.D. |last2=Thomson |first2=R.C. |date=2009 |title=Combined EBSD/EDS tomography in a dual-beam FIB/FEG-SEM |journal=Journal of Microscopy |volume=233 |issue=3 |pages=442–450 |doi=10.1111/j.1365-2818.2009.03138.x |pmid=19250465 |s2cid=42955621}}</ref>
EBSD, when used together with other in-SEM techniques such as [[cathodoluminescence]] (CL),<ref>{{Cite journal |last1=Moser |first1=D. E. |last2=Cupelli |first2=C. L. |last3=Barker |first3=I. R. |last4=Flowers |first4=R. M. |last5=Bowman |first5=J. R. |last6=Wooden |first6=J. |last7=Hart |first7=J.R. |date=2011 |editor-last=Davis |editor-first=William J. |title=New zircon shock phenomena and their use for dating and reconstruction of large impact structures revealed by electron nanobeam (EBSD, CL, EDS) and isotopic U–Pb and (U–Th)/He analysis of the Vredefort domeThis article is one of a series of papers published in this Special Issue on the theme of Geochronology in honour of Tom Krogh|journal=Canadian Journal of Earth Sciences |volume=48 |issue=2 |pages=117–139 |bibcode=2011CaJES..48..117D |doi=10.1139/E11-011 }}</ref> [[wavelength dispersive X-ray spectroscopy]] (WDS)<ref>{{Cite journal |last1=Laigo |first1=J. |last2=Christien |first2=F. |last3=Le Gall |first3=R. |last4=Tancret |first4=F. |last5=Furtado |first5=J. |date=2008 |title=SEM, EDS, EPMA-WDS and EBSD characterization of carbides in HP type heat resistant alloys |journal=Materials Characterization |volume=59 |issue=11 |pages=1580–1586 |doi=10.1016/j.matchar.2008.02.001 }}</ref> and/or EDS can provide a deeper insight into the specimen's properties and enhance phase identification.<ref>{{Cite web |date=2023-01-18 |title=Microscale Analysis of Lithium-Containing Compounds and Alloys |url=https://www.azom.com/article.aspx?ArticleID=22349 |url-status=live |archive-url=https://web.archive.org/web/20230217121105/https://www.azom.com/article.aspx?ArticleID=22349 |archive-date=2023-02-17 |website=AZoM.com }}</ref><ref>{{Cite journal |last1=Wisniewski |first1=Wolfgang |last2=Švančárek |first2=Peter |last3=Prnová |first3=Anna |last4=Parchovianský |first4=Milan |last5=Galusek |first5=Dušan |date=2020|title=Y<sub>2</sub>O<sub>3</sub>–Al<sub>2</sub>O<sub>3</sub> microsphere crystallization analyzed by electron backscatter diffraction (EBSD) |journal=Scientific Reports |volume=10 |issue=1 |pages=11122 |bibcode=2020NatSR..1011122W |doi=10.1038/s41598-020-67816-7 |pmc=7338460 |pmid=32632218}}</ref> For example, the minerals [[calcite]] ([[limestone]]) and [[aragonite]] ([[Animal shell|shell]]) have the same chemical composition – [[calcium carbonate]] (CaCO<sub>3</sub>) therefore EDS/WDS cannot tell them apart, but they have different microcrystalline structures so EBSD can differentiate between them.<ref>{{Cite journal |last1=Ohfuji |first1=Hiroaki |last2=Yamamoto |first2=Masashi |date=2015 |title=EDS quantification of light elements using osmium surface coating |journal=Journal of Mineralogical and Petrological Sciences |volume=110 |issue=4 |pages=189–195 |bibcode=2015JMPeS.110..189O |doi=10.2465/jmps.141126 |s2cid=93672390|doi-access=free }}</ref><ref>{{Citation |last=Frahm |first=Ellery |title=Scanning Electron Microscopy (SEM): Applications in Archaeology |date=2014 |encyclopedia=Encyclopedia of Global Archaeology |pages=6487–6495 |place=New York, New York |publisher=Springer New York |doi=10.1007/978-1-4419-0465-2_341 |isbn=978-1-4419-0426-3 }}</ref>
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