Deep reactive-ion etching: Difference between revisions

Revision as of 14:31, 21 June 2023

Revision as of 01:16, 12 December 2023

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This has allowed for silicon components to be substituted for some parts which are usually made of steel, such as the [[hairspring]]. Silicon is lighter and harder than steel, which carries benefits but makes the manufacturing process more challenging.

==References==

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==See also==

*[[Microelectromechanical systems]]

*[[Reactive-ion etching]]

*[[Microelectromechanical systems]]

==References==

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{{Bosch}}