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==Links==
* [http://dom.semi.org/downloads.nsf/standard?openform&did=CAA8924E5F147E26882573E1004D6864&sid=0 The Open Artwork Systems Integration Standard (OASIS), also formally known as SEM P39 is owned and maaintained by (and can be purchased from) the trade and standards organization SEMI which serves the semiconductor materials and equipment industries worldwide
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[[Category:Design layout file formats]]
[[Category:Mask layout file formats]]
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