Plasma processing: Difference between revisions

Revision as of 15:55, 24 February 2004

Revision as of 08:13, 25 February 2004

Line 1:

'''Plasma pocessing''' is a [[plasma]]-based material processing technology that aims at modifying a surface'sthe chemical and physical properties of a surface.

Plasma processing techniques include:

Line 7:

*[[Plasma polymerization]]

Related disciplinestopics are [[plasma chemistry]], [[chemical vapor deposition]], and [[physical vapor deposition]] processes like [[sputtering]], [[plasma ion doping]], and [[reactive ion etching]].

Related disciplines are [[chemical vapor deposition]] and [[physical vapor deposition]] processes like [[sputtering]], [[plasma ion doping]], and [[reactive ion etching]].