Process development execution system: Difference between revisions

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A '''Process Development Execution System (PDES)''' is a [[system]] which is used by companies to perform development activities for [[high-tech]] [[manufacturing]] processes. A PDES is similar to a [[Manufacturing_Execution_Systems|Manufacturing Execution System (MES)]] in several ways. The key distinguishing factor of a PDES is that it is tailored for steering the development of a manufacturing process, while MES is tailored for executing the volume production using the developed process. Therefore, the toolset and focus of a PDES is on lower volume but higher flexibility and experimentation freedom. The tools of an MES are more focused on less variance, higher volumes, tighter control and logistics. Both types of [[application software]] increase [[traceability]], [[productivity]], and [[quality]] of the delivered result. For PDESs quality refers to the [[robustness]] of the developed manufacturing process. For MESs quality refers to the quality of the manufactured [[good (economics and accounting)]]/commodity. Additionally both software types share functions including [[equipment]] tracking, [[product]] genealogy, [[Work|labour]] and item tracking, [[cost]]ing, [[electronic signature]] capture, [[defect]] and resolution monitoring, [[Executive Dashboard]]s, and other various reporting solutions. Another rather similar software category are [[LIMS|Laboratory Information Management System(LIMS)]] and [[Laboratory_information_system|Laboratory information system(LIS)]]. PDESs’ offer a wider set of functionalities e.g. virtual manufacturing techniques, while they are typically not integrated with the equipment in the laboratory.

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The processing rule check gives no indication about the functionality or even the structure of the produced good or device. In the area of [[semiconductor device fabrication]], the techniques of [[semiconductor process simulation]] / [[Technology CAD|TCAD]] can provide an idea about the produced structures. To support this ’virtual fabrication’, a PDES is able to manage simulation models for process steps. Usually the simulation results are seen as standalone data, to rectify this situation PDESs' are also able to manage the resulting files in combination with the process flow. This enables the engineer to easily compare the expected results with the simulated outcome. The knowledge gained from the comparison can again be used to improve the simulation model.

After virtual verification the device is produced in an experimental fabrication environment. A PDES allows a transfer of the process flow to the fabrication environment (for example in semiconductor: [[Fab (semiconductors)|FAB]]). This can be done by simply printing out a runcard for the operator or by interfacing to the [[Manufacturing Execution SystemManufacturing_Execution_Systems|MES]] of the facility. On the other hand a PDES is able to manage and document last minute changes to the flow like parameter adjustments during the fabrication.

During and after processing a lot of measurements are taken. The results of these measurements are often produced in the form of files such as images or simple text files containing rows and columns of data. The PDES is able to manage these files, to link related results together, and to manage different versions of certain files, for example reports. Paired with flexible text, and graphical retrieval and search methods, a PDES provides the mechanism to view and assess the accumulated data, information and knowledge from different perspectives. It provides insight into both the information aspects as well as the time aspects of previous developments.

Increasingly development activities within industry are a collaborative effort. This leads to the need to exchange the information between the partners or to transfer process [[Intellectual property|IP]] from a vendor to a customer. PDESs' support this transfer while being selective to protect the IPR of the company.

== References ==

*D. Ortloff, J. Popp, T. Schmidt, and R. Brück. Process Development Support Environment: A tool SUITE TO ENGINEER MANUFACTURING SEQUENCES In International Journal of Nanomanufacturing, “Recent Developments and Innovations in NEMS/MEMS devices”, 2007

*T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, and R. Brück. OPTIMIZATION OF MEMS FABRICATION PROCESS DESIGN BY VIRTUAL EXPERIMENTS. In Proceedings of SPIE: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, Adelaide, volume 6415, 2006. Smart Materials, Nano and Micro-Smart Systems 2006.

*NEXUS news. [http://www.mstnews.de/downloads/pdf/news-0208.pdf "Successful Outcome from the PROMENADE Project..."], ''mst|news'', April, 2008.

T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, and R. Brück. OPTIMIZATION OF MEMS FABRICATION PROCESS DESIGN BY VIRTUAL EXPERIMENTS. In Proceedings of SPIE: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, Adelaide, volume 6415, 2006. Smart Materials, Nano and Micro-Smart Systems 2006.

*ICT Results. [http://cordis.europa.eu/ictresults/pdf/factsheet/INF%207%200100%20IST%20Results%20fact%20sheets_%20promenade.pdf "A virtual factory for micromachines"], ''ICT Results'', June, 2007.

== See also ==

* [[Microfabrication]]

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* [[Semiconductor device fabrication]]

* [[LIMS|Laboratory Information Management System(LIMS)]]

* [[Laboratory_information_system|Laboratory information system(LIS)]]

* [[MEMS]]