Silicon microstructures inc: Difference between revisions

Revision as of 20:55, 14 November 2006

Revision as of 20:59, 14 November 2006

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'''Silicon Microstructures, Inc.''' (SMI) is a producer of and supplier of [[pressure sensors]] and microstructures located in Milpitas, CA.

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'''Silicon Microstructures, Inc.''' (SMI, Website: http://www.si-micro.com), locatedwas founded in Milpitas, CA1991 isas a suppliercommercial source of both standard and customhigh-performance [[silicon pressure sensors]], andincluding other[[MEMS]] sensors, and [[microstructuresaccelerometers]]. Its first product was a silicon sensor for very low-pressure usage.

Silicon Microstructures, Inc. (SMI) was founded in 1991 as a commercial source of high-performance [[silicon pressure sensors]], including [[MEMS]] sensors, and [[accelerometers]].

Its first product was a silicon sensor for very low-pressure usage.

In April 2001, a SMI became a subsidiary of Elmos Semiconductor AG. After the Merger, SMI began production on higher performance, system level sensors and microstructures, wireless, RF and bus addressable microstructures.

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This facility is currently processing primarily 6 inch wafers and has advanced etch capabilities including Deep Reactive Ion Etching (DRIE) and Plasma Enhanced Fusion Bonding.

SMI's Website: http://www.si-micro.com