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Line 7: In August 2002, SMI acquired the IC Sensors' wafer fab operations and wafer R&D group and relocated to Milpitas, California. The following year, SIlicon Microstructures undertook a significant and complete wafer fab upgrade to expand the facility for full 6" wafer handling. This facility is currently processing primarily 6 inch wafers and has advanced etch capabilities including Deep Reactive Ion Etching ([[DRIE]]) and Plasma Enhanced [[Fusion Bonding]]. SMI's Website: http://www.si-micro.com

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