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Plasma source
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Plasma excitation by electromagnetic fields
Frequency ranges
Direct current (DC) discharge
kHz
Radio-frequency (RF) discharge (MHz)
Microwave (MW) discharge (GHz)
Optical frequencies (THz)
Excitation modes
Inductively coupled plasma
Solenoid coil
Planar coil
Helical resonator
Capacitively coupled plasma
Parallel plate recator
Wave-heated plasma
Electron cyclotron resonance
Helicon discharge
Surface-wave-sustained mode
Resonator mode
Pressure ranges
Low pressure discharge
Atmospheric pressure discharge